Microelectromechanical systems in the context of Lab-on-a-chip

An accelerometer is a device that measures the proper acceleration of an object. Proper acceleration is the acceleration (the rate of change of velocity) of the object relative to an observer who is in free fall (that is, relative to an inertial frame of reference). Proper acceleration is different from coordinate acceleration, which is acceleration with respect to a given coordinate system, which may or may not be accelerating. For example, an accelerometer at rest on the surface of the Earth will measure an acceleration due to Earth's gravity straight upwards of about g ≈ 9.81 m/s. By contrast, an accelerometer that is in free fall will measure zero acceleration.

Highly sensitive accelerometers are used in inertial navigation systems for aircraft and missiles. In unmanned aerial vehicles, accelerometers help to stabilize flight. Micromachined micro-electromechanical systems (MEMS) accelerometers are used in handheld electronic devices such as smartphones, cameras and video-game controllers to detect movement and orientation of these devices. Vibration in industrial machinery is monitored by accelerometers. Seismometers are sensitive accelerometers for monitoring ground movement such as earthquakes.

Since the mid-20th century, electron-beam technology has provided the basis for a variety of novel and specialized applications in semiconductor manufacturing, microelectromechanical systems, nanoelectromechanical systems, and microscopy.

Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades, microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields have re-used, adapted or extended microfabrication methods. These subfields include microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems). The production of flat-panel displays and solar cells also uses similar techniques.

Miniaturization of various devices presents challenges in many areas of science and engineering: physics, chemistry, materials science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research. The major concepts and principles of microfabrication are microlithography, doping, thin films, etching, bonding, and polishing.

Supercritical drying, also known as critical point drying, is a process to remove liquid in a precise and controlled way. It is useful in the production of microelectromechanical systems (MEMS), the drying of spices, the production of aerogel, the decaffeination of coffee and in the preparation of biological specimens.

An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining.

Since the 1960s, excimer lasers have been widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing.

Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Applications include accelerometers and sensors to detect chemical substances in the air.

Micromirror devices are devices based on microscopically small mirrors. The mirrors are microelectromechanical systems (MEMS), which means that their states are controlled by applying a voltage between the two electrodes around the mirror arrays. Digital micromirror devices are used in video projectors and optics and micromirror devices for light deflection and control.

An attitude and heading reference system (AHRS) consists of sensors on three axes that provide attitude information for aircraft, including roll, pitch, and yaw. These are sometimes referred to as MARG (Magnetic, Angular Rate, and Gravity) sensors and consist of either solid-state or microelectromechanical systems (MEMS) gyroscopes, accelerometers and magnetometers. They are designed to replace traditional mechanical gyroscopic flight instruments.

The main difference between an Inertial measurement unit (IMU) and an AHRS is the addition of an on-board processing system in an AHRS, which provides attitude and heading information. This is in contrast to an IMU, which delivers sensor data to an additional device that computes attitude and heading. With sensor fusion, drift from the gyroscopes integration is compensated for by reference vectors, namely gravity, and the Earth's magnetic field. This results in a drift-free orientation, making an AHRS a more cost effective solution than conventional high-grade IMUs that only integrate gyroscopes and rely on a high bias stability of the gyroscopes.In addition to attitude determination an AHRS may also form part of an inertial navigation system.

Micromachines are mechanical objects that are fabricated in the same general manner as integrated circuits. They are generally considered to be between 100 nanometres to 100 micrometres in size, although that is debatable. The applications of micromachines include accelerometers that detect when a car has hit an object and trigger an airbag. Complex systems of gears and levers are another application.

Microlithography is a general name for any manufacturing process that can create a minutely patterned thin film of protective materials over a substrate, such as a silicon wafer, in order to protect selected areas of it during subsequent etching, deposition, or implantation operations.The term is normally used for processes that can reliably produce features of microscopic size, such as 10 micrometres or less. The term nanolithography may be used to designate processes that can produce nanoscale features, such as less than 100 nanometres.

Microlithography is a microfabrication process that is extensively used in the semiconductor industry and also manufacture microelectromechanical systems.

A microvalve is a microscale valve, i.e. a microfluidic two-port component that regulates the flow between two fluidic ports. Microvalves are basic components in microfluidic devices, such as labs-on-a-chip, where they are used to control the fluidic transport. During the period from 1995 to 2005, many microelectromechanical systems-based microvalves were developed.

Microvalves found today can be roughly categorized as active microvalves and passive microvalves.Based on the medium they control, microvalves can be divided into gas microvalves and liquid microvalves.Based on their initial mode, microvalves can be divided into normally open, normally closed and bistable microvalves.

Sandia National Laboratories (SNL), also known as Sandia, is one of three research and development laboratories of the United States Department of Energy's National Nuclear Security Administration (NNSA). Headquartered in Kirtland Air Force Base in Albuquerque, New Mexico, it has a second principal facility next to Lawrence Livermore National Laboratory in Livermore, California, and a test facility in Waimea, Kauaʻi, Hawaii. Sandia is owned by the U.S. federal government but privately managed and operated by National Technology and Engineering Solutions of Sandia, a wholly owned subsidiary of Honeywell International.

Established in 1949, SNL is a "multimission laboratory" with the primary goal of advancing U.S. national security by developing various science-based technologies. Its work spans roughly 70 areas of activity, including nuclear deterrence, arms control, nonproliferation, hazardous waste disposal, and climate change. Sandia hosts a wide variety of research initiatives, including computational biology, physics, materials science, alternative energy, psychology, MEMS, and cognitive science. Most notably, it hosted some of the world's earliest and fastest supercomputers, ASCI Red and ASCI Red Storm, and is currently home to the Z Machine, the largest X-ray generator in the world, which is designed to test materials in conditions of extreme temperature and pressure.