Electron probe microanalysis (EPMA), also known as electron probe X-ray microanalysis, electron microprobe analysis (EMPA) or electron probe analysis (EPA) is a microanalytical and imaging technique used to non-destructively determine the chemical element composition of small volumes of solid materials. The device used for this technique is known as an electron probe microanalyzer (also abbreviated EPMA), often shortened to electron microprobe (EMP) or electron probe (EP).
In EPMA, the instrument bombards the sample with a high-intensity electron beam, which then emits X-rays. The X-ray wavelengths emitted are characteristic of particular chemical elements and are analyzed using X-ray spectroscopy. The same principle is also employed in wavelength- orenergy-dispersive X-ray spectroscopy (WDX, EDX) commonly used in scanning electron microscopes (SEM), but EPMA is characterized by a fixed electron beam rather than a scanning one and primarily used for elemental analysis rather than imaging.