Megasonic cleaning is a specialized cleaning method that utilizes high-frequency sound waves to remove contaminants from delicate surfaces. It is particularly effective in industries like semiconductor manufacturing, optics, and medical device production, where precision and gentle cleaning are crucial. It is a type of acoustic cleaning related to ultrasonic cleaning. Similar to ultrasonic cleaning, megasonic cleaning uses a transducer that sits on top of a piezoelectric substrate. The transducer creates acoustic waves at a higher frequency (typically 0.8–2 MHz) than ultrasonic cleaning (20-200 kHz). As a result, the cavitation that occurs is reduced and on a much smaller scale.
